Emerging semiconductor technology
Title
:
Emerging semiconductor technology
Series
:
Special technical publication (ASTM); 960
Publication Information
:
Philadelphia, PA : American Society for Testing and Materials, c1987.
Physical Description
:
704 p. : ill. ; 24 cm.
ISBN
:
9780803104594
Subject Term
:
Semiconductor industry -- Congresses
Semiconductors -- Design and construction -- Congresses
Added Author
:
Langer, Paul H.
Added Corporate Author
:
ASTM. Committee F-1 on Electronics
Added Conference Author
:
Symposium on Semiconductor Processing (4th : 1986 : San Jose, Calif.)
Library | Item Barcode | Call Number | Material Type | Item Category 1 |
---|
PSZ JB | 30000001619018 | TK7871.85 .E47 1987 | Open Access Book | Proceedings, Conference, Workshop etc. |