Emerging semiconductor technology
Title
: 
Emerging semiconductor technology

Series
: 
Special technical publication (ASTM); 960

Publication Information
: 
Philadelphia, PA : American Society for Testing and Materials, c1987.

Physical Description
: 
704 p. : ill. ; 24 cm.

ISBN
: 
9780803104594

Subject Term
: 
Semiconductor industry -- Congresses
 
Semiconductors -- Design and construction -- Congresses

Added Author
: 
Langer, Paul H.

Added Corporate Author
: 
ASTM. Committee F-1 on Electronics

Added Conference Author
: 
Symposium on Semiconductor Processing (4th : 1986 : San Jose, Calif.)


LibraryItem BarcodeCall NumberMaterial TypeItem Category 1
PSZ JB30000001619018TK7871.85 .E47 1987Open Access BookProceedings, Conference, Workshop etc.