X-ray metrology in semiconductor manufacturing
Title
: 
X-ray metrology in semiconductor manufacturing

Personal Author
: 
Bowen, D. Keith (David Keith), 1940-

Publication Information
: 
Boca Raton, FL : CRC/Taylor & Francis, 2006

ISBN
: 
9780849339288

Subject Term
: 
Semiconductors -- Design and construction -- Quality control
 
Integrated circuits -- Measurement
 
Semiconductor wafers -- Inspection
 
X-rays -- Diffraction

Added Author
: 
Tanner, B. K. (Brian Keith)


LibraryItem BarcodeCall NumberMaterial TypeItem Category 1
PSZ JB30000010159152TK7874.58 B68 2006Open Access BookBook