Polymers for microelectronics : resists and dielectrics
Title
: 
Polymers for microelectronics : resists and dielectrics

Series
: 
ACS symposium series; 537

Publication Information
: 
Washington, DC : American Chemical Society, 1994

ISBN
: 
9780841227217

General Note
: 
Development from a symposium sponsored by the Division of Polymeric Materials : Science and Engineering, inc, of the American Chemical Society, San Francisco, California, April 5-10, 1992

Subject Term
: 
Microelectronics -- Materials -- Congresses
 
Polymers -- Congresses

Added Author
: 
Thompson, L. F., 1944-
 
Willson, C. G. (C. Grant), 1939-
 
Tagawa, Seiichi

Added Corporate Author
: 
American Chemical Society. Division of Polymeric Materials : Science and Engineering

Added Conference Author
: 
American Chemical Society Meeting (203rd : 1992 : San Francisco, Calif)


LibraryItem BarcodeCall NumberMaterial TypeItem Category 1
PSZ JB30000003052457TK7871.15.P6 P64 1994Open Access BookProceedings, Conference, Workshop etc.