Nanolithography and patterning techniques in microelectronics
Title
: 
Nanolithography and patterning techniques in microelectronics

Series
: 
Woodhead publishing in materials

Publication Information
: 
Cambridge : Woodhead Publishing Limited, 2005

ISBN
: 
9781855739314

Subject Term
: 
Microlithography
 
Nanotechnology

Added Author
: 
Bucknall, David G.


LibraryItem BarcodeCall NumberMaterial TypeItem Category 1
PSZ JB30000010099514TK7874 N365 2005Open Access BookBook