The effect of substrate temperature on the growth of Al thin film on silicon wafer(100) substrate
Title
: 
The effect of substrate temperature on the growth of Al thin film on silicon wafer(100) substrate

Personal Author
: 
Phong, Wei Loon, 1988-

Publication Information
: 
2012

Physical Description
: 
xvii, 83 p. : ill. ; 30 cm.

General Note
: 
Supervisor : Dr. Muhamad Azizi Mat Yajid
 
Also available in CD ROM : CP 055454 ra

Subject Term
: 
Thin films

Added Author
: 
Muhamad Azizi Mat Yajid,

Added Corporate Author
: 
Fakulti Kejuruteraan Mekanikal

Project Paper (Sarjana Muda Kejuruteran (Mekanikal - Bahan)) - Universiti Teknologi Malaysia, 2012


LibraryItem BarcodeCall NumberMaterial TypeItem Category 1
FKM LibraryFKM30000006727XX(792414.1)Closed Access ThesisUTM Project Paper (Open Shelves)
Perpustakaan Raja Zarith Sofiah30000010294592QC176.83 P46 2012 rafClosed Access ThesisUTM Project Paper (Closed Access)