Production planning and control for semiconductor wafer fabrication facilities : modeling, analysis, and systems
Title
:
Production planning and control for semiconductor wafer fabrication facilities : modeling, analysis, and systems
Personal Author
:
Mönch, Lars
Publication Information
:
New York : Springer, c2013
Physical Description
:
xii, 288 p. : ill. (some col.) ; 24cm.
ISBN
:
9781461444718
9781461444725
Subject Term
:
Semiconductors -- Design and construction
Semiconductor wafers -- Design and construction
Production planning
Added Author
:
Fowler, J. W.
Mason, Scott J.
Library | Item Barcode | Call Number | Material Type | Item Category 1 |
---|
Razak School | 30000010306738 | TK7871.85 M5735 2013 | Open Access Book | Book |