Production planning and control for semiconductor wafer fabrication facilities : modeling, analysis, and systems
Title
Production planning and control for semiconductor wafer fabrication facilities : modeling, analysis, and systems

Personal Author
Mönch, Lars

Publication Information
New York : Springer, c2013

Physical Description
xii, 288 p. : ill. (some col.) ; 24cm.

ISBN
9781461444718
 
9781461444725

Subject Term
Semiconductors -- Design and construction
 
Semiconductor wafers -- Design and construction
 
Production planning

Added Author
Fowler, J. W.
 
Mason, Scott J.


LibraryItem BarcodeCall NumberMaterial TypeItem Category 1
Razak School30000010306738TK7871.85 M5735 2013Open Access BookBook