Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films
Title
: 
Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films

Personal Author
: 
Choi, W. K.

General Note
: 
Journal of Applied Physics, Vol. 83(9): 4968-4973. 1998

Subject Term
: 
Physics
 
X-ray photoelectron spectroscopy

Added Author
: 
Ong, T.Y.
 
Tan, L.S.
 
Loh, F.C.


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PSZ JB30000010314849MAK 18551Open Access BookILL Article