Run-to-run control in semiconductor manufacturing
Title
: 
Run-to-run control in semiconductor manufacturing

Publication Information
: 
Boca Raton : CRC Press, 2001

ISBN
: 
9780849311789

General Note
: 
Also available in online version from EngnetBase

Subject Term
: 
Semiconductors -- Design and construction
 
Semiconductor industry -- Production control
 
Electronic packaging
 
Production management

Added Author
: 
Moyne, James
 
Del Castillo, Enrique
 
Hurwitz, Arnon Max

Electronic Access
: 
Online access via EngnetBase

Open access to UTM community only


LibraryItem BarcodeCall NumberMaterial TypeItem Category 1
PSZ JB30000004416230TK7871.85 R86 2001Open Access BookBook