Materials and process characterization for VLSI
Title
: 
Materials and process characterization for VLSI

Conference Author
: 
International Conference on Materials and Process Characterization for VLSI (1988 : Shanghai, China)

Publication Information
: 
Singapore: World Scientific, 1988

ISBN
: 
9789971506889

Subject Term
: 
Integrated circuits -- Very large scale integration -- Congresses
 
Integrated circuits -- Very large scale integration -- Design and construction -- Data processing
 
Semiconductors -- Congresses

Added Author
: 
Wang, Yangyuan
 
Chen, Jun
 
Zong, Xiangfu


LibraryItem BarcodeCall NumberMaterial TypeItem Category 1
PSZ JB30000000443147TK7874.I59 1988Open Access BookProceedings, Conference, Workshop etc.