Low-temperature PECVD of nanodevice-grade nc-3C-SiC
Title
:
Low-temperature PECVD of nanodevice-grade nc-3C-SiC
Personal Author
:
Cheng, Qijin
General Note
:
Chem. Vap. Deposition, Vol. 13 : 561-566. 2007
Subject Term
:
Nanocrystals
Silicon carbide
Added Author
:
Shuyan, Xu
Long, Jidong
Ostrikov, Kostya (Ken)
| Library | Item Barcode | Call Number | Material Type | Item Category 1 |
|---|
| PSZ JB | 30000010238009 | MAK 17828 | Open Access Book | Index and Abstract |