Title:
Silicides for VLSI applications
Personal Author:
Publication Information:
New York : Academic Press, 1983
ISBN:
9780125112208
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 30000000549448 | TK7871.15.S45M87 1983 | Open Access Book | Book | Searching... |
On Order
Summary
Summary
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
Table of Contents
| Preface |
| Acknowledgements |
| Introduction |
| Properties |
| Thermodynamic Considerations |
| Formation |
| Oxidation |
| Integrated-Circuit Fabrication |
| Special Applications |
| References |
| Author Index |
| Subject Index |
