Title:
Silicides for VLSI applications
Personal Author:
Publication Information:
New York : Academic Press, 1983
ISBN:
9780125112208
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
---|---|---|---|---|---|
Searching... | 30000000549448 | TK7871.15.S45M87 1983 | Open Access Book | Book | Searching... |
On Order
Summary
Summary
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
Table of Contents
Preface |
Acknowledgements |
Introduction |
Properties |
Thermodynamic Considerations |
Formation |
Oxidation |
Integrated-Circuit Fabrication |
Special Applications |
References |
Author Index |
Subject Index |