Title:
The chemistry of the semiconductor industry
Publication Information:
Glasgow : Blackie, 1987
ISBN:
9780216920057
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
---|---|---|---|---|---|
Searching... | 30000000513089 | TK7871.85.C53 1987 | Open Access Book | Book | Searching... |
Searching... | 30000000513097 | TK7871.85.C53 1987 | Open Access Book | Book | Searching... |
On Order
Summary
Summary
This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.