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Cover image for Computational lithography
Title:
Computational lithography
Personal Author:
Ma, Xu, 1983-
Series:
Wiley series in pure and applied optics

Wiley series in pure and applied optics.
Publication Information:
Hoboken, N.J. : Wiley, c2010
Physical Description:
xv, 226 p. : ill. ; 25 cm.
ISBN:
9780470596975
Subject Term:
Microlithography -- Mathematics

Integrated circuits -- Design and construction -- Mathematics

Photolithography -- Mathematics

Semiconductors -- Etching -- Mathematics
Added Author:
Arce, Gonzalo R.

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Library
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Material Type
Item Category 1
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 30000010253873 TK7872.M3 M3 2010 Open Access Book Book
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