Etching performance of silicon wafers with redesigned etching drum

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Title:

Etching performance of silicon wafers with redesigned etching drum

Personal Author:

Publication Information:

Skudai : Universiti Teknologi Malaysia, 2006

Physical Description:

xv, 107 p. : ill. (some col.) ; 30 cm.

General Note:

Also available in compact disc version : CP 0168123 ra

Supervisor : En. Hamidon Musa

Subject Term:

Semiconductor wafers

Etching -- Technique

Added Author:

Added Corporate Author:

Universiti Teknologi Malaysia. Fakulti Kejuruteraan Mekanikal

Electronic Access:

Full text thesis via UTM-IR

DSP_DISSERTATION:

Thesis (Sarjana Kejuruteraan Mekanikal (Teknologi Pembuatan Termaju)) - Universiti Teknologi Malaysia, 2005

Available:*

Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... FKM Library	FKM30000005422	QC611.24 R69 2006 raf	Closed Access Thesis	UTM Master Thesis (Closed Access)	Searching... Unknown
Searching... Perpustakaan Raja Zarith Sofiah	30000010187880	QC611.24 R69 2006 raf	Closed Access Thesis	UTM Master Thesis (Closed Access)	Searching... Unknown

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