Title:
Materials science and technology : a comprehensive treatment
Series:
Materials science and technology ; 16
Publication Information:
Weinheim : VCH, 1996
ISBN:
9783527268290
Subject Term:
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 30000004739144 | TA403 M355 1996 r | Closed Access Book | 1:BOOK_ARC | Searching... |
Searching... | 30000004502013 | TA403 M355 1996 r | Closed Access Book | 1:BOOKREF | Searching... |
Searching... | 30000003852070 | TA403 M355 1996 | Reference Book | 1:BOOKREF | Searching... |
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Summary
Summary
This self-contained handbook deals with the enabling materials technology for the electronics industry. World renowned authors have contributed to this unique treatment of the processing of semiconductors and related technologies.
Contents: Wilkes: Silicon Processing. Mullin: Compound Semiconductor Processing, Kuech/BleLagally/Tischler: Epitaxial Growth. Leuschner/Pawlowski: Photolithography. Griffin: Doping. Turner/Donohoe: Etching Processes in Semiconductor Manufacturing. Chang/Sze: Silicon Device Structures. Lam/Stanchina: Compound Semiconductor Device Structures. Kwong: Silicon Device Processing. Parsey, Jr: Compound Semiconductor Device Processing. Amey: Chip Carriers. Knausenberger/Turlik: Interconnection Systems.
Table of Contents
| Silicon ProcessingJ. Wilkes |
| Compound Semiconductor ProcessingJ. Mullin |
| Epitaxial GrowthT. Kuech and M. Tischler |
| PhotolithographyR. Leuschner and G. Pawlowski |
| Selective DopingS. Mahajan |
| Etching Processes in Semiconductor ManufacturingK. Donohoe, et al |
| Silicon Device StructuresC.-Y. Chang and S. Sze |
| Compound Semiconductor Device StructuresW. Stanchina and J. Lam |
| Silicon Device ProcessingD.-L. Kwong |
| Compound Semiconductor Device ProcessingJ. Parsey |
| Integrated Circuit PackagingD. Amey |
| Interconnection SystemsW. Knausenberger |
| Index |
