Title:
Modeling and simulation of material handling for semiconductor wafer fabrication
Personal Author:
General Note:
Paper presented at the Proceedings of the 1994 Winter Simulation Conference. 900-906
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Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
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Searching... | 30000003121666 | MAK 8090 | Open Access Book | Article | Searching... |