Integrated semiconductor circuits. Photo-lithography - basic fabrication step in the silicon planar technology

Title:

Publication Information:

Munich : Siemens, [198-]

Physical Description:

1 chart : colour, 69 x 97 1/2 cm

General Note:

Title also appears in German

Subject Term:

Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... PSZ JB	30000003488388	CTA TK7871.85 V32	Open Access Mixed Materials	Chart Accompanies Open Access Book	Searching... Unknown