Title:
Infrared and x-ray photoelectron spectroscopy studies of as-prepared and furnace-annealed radio-frequency sputtered amorphous silicon carbide films
Personal Author:
General Note:
Journal of Applied Physics, Vol. 83(9): 4968-4973. 1998
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
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Searching... | 30000010314849 | MAK 18551 | Open Access Book | ILL Article | Searching... |