Title:
Amorphous insulating thin films II : proceeding of Symposium A on Amorphous Insulating Thin Films II of the 1994 E-MRS Spring Conference, Strasbourg, France, 24-27 May 1994
Publication Information:
Amsterdam : Elsevier Science, 1995
ISBN:
9780444821614
Added Author:
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 30000003924846 | TK7871.15.F5 S99 1994 f | Open Access Book | Proceedings, Conference, Workshop etc. | Searching... |
On Order
Summary
Summary
These proceedings present a review of the research being carried out in the field of amorphous insulating thin films. Topics discussed include: nitrides, structure and defects; hydrogen in MOS structures and oxides; silicon dioxide, charge trapping; and ONO and nitride oxides.
