Title:
High fidelity simulation models for equipment performance prediction in semiconductor industry
Personal Author:
Publication Information:
2014
Physical Description:
xix, 210 p. : ill. (some col.) ; 30 cm.
General Note:
Also available in CD-ROM : CP 050191 ra
Supervisor : Prof. Dr. Awaluddin Mohamed Shaharoun
Added Author:
Added Corporate Author:
DSP_DISSERTATION:
Thesis (Ph.D (Pengurusan Perniagaan Kejuruteraan)) – Universiti Teknologi Malaysia, 2014
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 30000010325785 | HD30.2 A594 2014 raf | Closed Access Thesis | UTM PhD Thesis (Closed Access) | Searching... |
Searching... | SPS30000004473 | XX(829828.1) | Closed Access Thesis | UTM PhD Thesis (Closed Access) | Searching... |
