Advanced processes for 193-nm immersion lithography

Title:

Personal Author:

Publication Information:

Bellingham, WAh : SPIE Publications, 2009

Physical Description:

xix, 315 p. : ill. ; 26 cm.

ISBN:

9780819475572

Subject Term:

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Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... PSZ JB	30000010226072	TK7872.M3 W45 2009	Open Access Book	Book	Searching... Unknown