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Cover image for X-ray metrology in semiconductor manufacturing
Title:
X-ray metrology in semiconductor manufacturing
Personal Author:
Bowen, D. Keith (David Keith), 1940-
Publication Information:
Boca Raton, FL : CRC/Taylor & Francis, 2006
ISBN:
9780849339288
Subject Term:
Semiconductors -- Design and construction -- Quality control

Integrated circuits -- Measurement

Semiconductor wafers -- Inspection

X-rays -- Diffraction
Added Author:
Tanner, B. K. (Brian Keith)

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 30000010159152 TK7874.58 B68 2006 Open Access Book Book
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