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Cover image for Modelling of MEMS Fabry Perot pressure sensor using CMOS fabrication process
Title:
Modelling of MEMS Fabry Perot pressure sensor using CMOS fabrication process
Publication Information:
2012
Physical Description:
xv, 64 p. : ill. (some colors) ; 30 cm.
General Note:
Supervisor : Dr. Nor Hafizah Ngajikin
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Added Corporate Author:
DSP_DISSERTATION:
Project Paper (Sarjana Muda Kejuruteraan (Elektrik - Telekomunikasi)) - Universiti Teknologi Malaysia, 2012

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30000010291958 TK7871.99.M44 L69 2012 raf Closed Access Thesis UTM Project Paper (Closed Access)
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