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Subject: Microelectromechanical systems

Author

(3)

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(1)

(1)

Lyshevski, Sergey Edward

(1)

Language

(6)

Format

(6)

(1)

Material Type

Electronic Book

Open Access Book

Subject

Microelectronic packaging

(5)

Microelectronics

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(1)

Electronic books

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Inertial navigation systems

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Photoelectronic devices

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1.

Cover image for Mems packaging

by

Hsu, Tai-Ran

Author

Hsu, Tai-Ran

Format:

Call Number

TK7874 M45 2004

Publisher

The Institution of Electrical Engineers,

Publication Date

2004

ISBN

9780863413353

Available:
Holds:
Copies:

SD_ILS:428371

2.

Cover image for Mems and microsystems : design, manufacture, and packaging

Mems and microsystems : design, manufacture, and packaging

by

Hsu, Tai-Ran

Author

Hsu, Tai-Ran

Format:

Call Number

TK7874 H78 2008

Edition

2nd ed.

Publisher

John Wiley,

Publication Date

2008

ISBN

9780470083017

Available:
Holds:
Copies:

SD_ILS:224196

3.

Cover image for MEMS/MOEMS packaging : concepts, designs, metarials, and processes

MEMS/MOEMS packaging : concepts, designs, metarials, and processes

by

Gilleo, Ken

Author

Gilleo, Ken

Format:

Call Number

TK7870.15 G554 2005

Publisher

McGraw-Hill,

Publication Date

2005

ISBN

9780071455565

Available:
Holds:
Copies:

SD_ILS:442677

4.

Cover image for A guide to hands-on MEMS design and prototyping

A guide to hands-on MEMS design and prototyping

by

Kubby, Joel A.

Author

Kubby, Joel A.

Format:

Call Number

TK7875 K83 2011

Publisher

Cambridge University Press,

Publication Date

2011

ISBN

9780521889254

Available:
Holds:
Copies:

SD_ILS:786607

5.

Cover image for Inertial MEMS : principles and practice

Inertial MEMS : principles and practice

by

Kempe, Volker

Author

Kempe, Volker

Format:

Call Number

TK7875 K46 2011

Publisher

Cambridge University Press,

Publication Date

2011

ISBN

9780521766586

Available:
Holds:
Copies:

SD_ILS:787081

6.

Cover image for MEMS and microsystems : design and manufacture

MEMS and microsystems : design and manufacture

by

Hsu, Tai-Ran

Author

Hsu, Tai-Ran

Format:

Call Number

TK7874 H78 2002

Publisher

McGraw-Hill,

Publication Date

2002

ISBN

9780072393910

Available:
Holds:
Copies:

SD_ILS:303097

7.

Cover image for Nano & microelectromechanical systems: fundamentals of nano & nanoengineering

Nano & microelectromechanical systems: fundamentals of nano & nanoengineering

Nano & microelectromechanical systems: fundamentals of nano & nanoengineering

by

Lyshevski, Sergey Edward

Author

Lyshevski, Sergey Edward

Format:

Call Number

EB 000162

Publisher

CRC Press,

Publication Date

2000

Online via EngnetBase

Accessible within UTM campus

Available:
Holds:
Copies:

SD_ILS:516204

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