Cover image for Digital holography for MEMS and microsystem metrology
Title:
Digital holography for MEMS and microsystem metrology
Publication Information:
Chichester, West Sussex, U.K. ; Hoboken, N.J. : Wiley, 2011
Physical Description:
x, 205 p. : ill. ; 24 cm.
ISBN:
9780470978696
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30000010281285 TK7875 D54 2011 Open Access Book Book
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