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Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
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Searching... | 30000004719427 | TA418.9.N35 N367 2005 | Open Access Book | Book | Searching... |
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Summary
Summary
The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry.
Topics addressed in these proceedings are
a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing
b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements
c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing
Author Notes
Gunter Wilkening, Prof. Dr., Physikalisch-Technische Bundesanstalt, Braunschweig, Director of the Department of Nano- and Micrometrology
Gunter Wilkening received his Ph.D. in Solid State Physics from the Technical University of Braunschweig, Germany, in 1977. In 1978, he joined the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), where he conducts research in the fields of force measurement and dimensional measurements in the micro- and nanometre range. Since 1988 he has been involved in Scanning Probe Microscopy and its use for quantitative measurements. In 1994, Professor Wilkening became head of the Nano- and Micrometrology Department. He is an active member of a number of national and international committees.
Ludger Koenders, Dr.
Physikalisch-Technische Bundesanstalt, Braunschweig, Layer Thickness and Nanostructures Department
Ludger Koenders is head of the Film Thickness and Nanostructures Research Group at the National Metrology Institute (Technische Bundesanstalt PTB) in Braunschweig, Germany. He received his Diploma and his Ph.D. in Physics from the University of Duisburg. For his Ph.D. thesis he investigated the adsorption of hydrogen and oxygen on III-V semiconductor surfaces using surface analytical techniques (AES, EELS, UPS, XPS) and resonant Raman spectroscopy. He joined the National Metrology Institute in 1989 and has worked on investigations of tip-sample effects in STM, on the development metrological SPM and of transfer standards for SPM. He has co-ordinated several international comparisons in the field of step height and surface roughness measurements.
Table of Contents
| Part I Instrumentation - Overview |
| 1 Metrological Scanning Probe Microscopes |
| Instruments for Dimensional Nanometrology (Hans-Ulrich Danzebrink, Frank Pohlenz, Gaoliang Dai, and Claudio Dal Savio) |
| 2 Nanometrology at the IMGCM. Bisi and E. Massa and A. Pasquini and G. B. Picotto and M. Pisani |
| 3 Metrological Applications of X-ray InterferometryAndrew Yacoot |
| Part II Instrumentation - Long-Range Scanning Probe Microscope |
| 4 Advances in Traceable Nanometrology with the Nanopositioning and Nanomeasuring Machine (Eberhard Manske, Rostislav Mastylo, Tino Hausotte, Norbert Hofmann, and Gerd Jager) |
| 5 Coordinate Measurements in Microsystems by Using AFM-Probing: Problems and Solutions |
| 6 Metrological Large Range Scanning Force Microscope Applicable for Traceable Calibration of Surface Textures (Gaoliang Dai, Frank Pohlenz, Hans-Ulrich Danzebrink, Min Xu, Klaus Hasche, Gunter Wilkening) |
| Part III Instrumentation - Development of SPM and Sensors |
| 7 Traceable Probing with an AFMK. Dirscherl and K. R. Koops |
| 8 Scanning Probe Microscope Setup with Interferometric Drift CompensationAndrzej Sikora and Dmitri V. Sokolov and Hand U. Danzebrink |
| 9 DSP-Based Metrological Scanning Force Microscope with Direct Interfermetric Position Measurement and Improved Measurement SpeedGaoliang Dai and Frank Pohlenz and Hans-Ulrich Danzebrink and Klaus Hasche and Gunter Wilkening |
| 10 Combined Confocal and Scanning Probe Sensor for Nano-Coordinate MetrologyDmitri V. Sokolov and Dmitri V. Kazantesev and James W. G. Tyrrell and Tamosz Hasek and Hans U. Danzebrink |
| 11 Combined Shear Force-Tunneling Microscope with Interferometric Tip Oscillation Detection for Local Surface Investigation and OxidationAndrzej Sikora and Teodor Gotszalk and Roman Szeloch |
| 12 Low Noise Piezoresistive Micro Force SensorL. Doering and E. Peiner and V. Nesterov and U. Brand |
| Part IV Calibration - Overview |
| 13 Towards a Guideline for SPM CalibrationT. Dziomba and L. Koenders and G. Wilkening |
| 14 True Three-Dimensional Calibration of Closed Loop Scanning Probe MicroscopesJ. Garnaes and A. Kuhle and L. Nielsen and F. Borsetto |
| 15 Height and Pitch at Nanoscale |
| How Traceable is Nanometrology?L. Koenders and F. Meli |
| 16 The Behavior of Piezoelectric Actuators and the Effect on Step-Height Measurement with Scanning Force MicroscopesA. Grant and L. McDonnell and E. M. Gil Romero |
| 17 An Approach to the Development of Tolerance Systems for Micro- and NanotechnologyJ. Schobel and E. Westkamper |
| Part V Calibration - Standards for Nanometrology |
| 18. Standards for the Calibration of Instruments for Dimensional NanometrologyL. Koenders and T. Dziomba and P. Thomsen-Schmidt and G. Wilkening |
| 19 "Atomic Flat" Silicon Surface for the Calibration of Stylus InstrumentsS. Groger and M. Dietzsch |
| 20 Investigations of Nanoroughness Standards by Scanning Force Microscopes and Interference MicroscopeR. Kruger,-Sehm and T. Dziomba and G. Dai |
| 21. Testing the Lateral Resolution in the Nanometre Range with a New Type of Certified Reference MaterialM. Senoner and Th. Wirth and W. Osterle and I. Kaiander and R. L. Sellin and D. Bimberg |
| Part VI Calibration - Tip Shape |
| 22 Reconstruction and Geometric Assessment of AFM TipsTorsten Machleidt and Ralf Kastner and Karl-Heinz Franke |
| 23 Comparison of Different Methods of SFM Tip Shape Determination for Various Characterisation Structures and Types of TipS. Czerkas and T. Dziomba and H. Bosse |
| Part VII Calibration - Optical Methods |
| 24 Double Tilt Imaging Method for Measuring Aperture Correction FactorYen-Liang Chen and Chao-Jung Chen and Gwo-Sheng Peng |
| 25 How Statistical Noise Limits the Accuracy of Optical Interferometry for Nanometrology |
| 26 Uncertainty Analysis of the PTB Measuring Equipment for the Investigat |
