Title:
Polymers in microlithography : materials and processes
Series:
ACS symposium series; 412
Publication Information:
Washington, DC : American Chemical Society, 1989.
ISBN:
9780841217010
General Note:
"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."
Added Corporate Author:
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 30000000220461 | TK7871.15.P6 P66 1989 | Open Access Book | Book | Searching... |
