Title:
The construction of plasma reactor chamber and radio frequency generator in the RF PECVD system
Publication Information:
Skudai : Universiti Teknologi Malaysia, 1999
Added Conference Author:
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 30000004548180 | TK7871.15.F5 C66 1999 | Closed Access Book | 1:BOOK_ARC | Searching... |
Searching... | 30000004548149 | TK7871.15.F5 C66 1999 | Open Access Book | Proceedings, Conference, Workshop etc. | Searching... |
Searching... | 30000010030787 | TK7871.15.F5 C66 1999 | Open Access Book | Book | Searching... |
