Digital holography for MEMS and microsystem metrology

Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the book's relevance and appeal to both researchers and engineers keen to evaluate the potential of digital holography for integration into their existing machines and processes. Addresses particle characterization where digital holography has proven capability for dynamic measurement of particles in 3D for sizing and shape characterization, with applications in microfluidics as well as crystallization and aerosol detection studies. Discusses digital reflection holography, digital transmission holography, digital in-line holography, and digital holographic tomography and applications. Covers other applications including micro-optical and diffractive optical systems and the testing of these components, and bio-imaging.

Author Notes

Anand Asundi, Nanyang Technological University, Singapore
Anand Asundi is Professor and Deputy Director of the Advanced Materials Research Centre at Nanyang Technological University in Singapore. His research interests are in photomechanics and optical sensors & he has published over 200 papers in peer-reviewed journals and presented invited and plenary talks at international conferences. He has also chaired and organized numerous conferences in Singapore and other parts of the world.
He is Editor of Optics and Lasers in Engineering and on the Board of Directors of SPIE, and a fellow of the Institute of Engineers, Singapore and SPIE. He also holds advisory professorial appointments at Tongji University, Shanghai University and Harbin Institute of Technology, China. He is Chairman of the Asian Committee on Experimental Mechanics and the Asia Pacific Committee on Smart and Nano Materials both of which he co-founded.

Anand AsundiVijay R. Singh and Anand AsundiQu WeijuanTaslima KhanamCaojin Yuan and Hongchen ZhaiYu YingjieJianlin ZhaoAnand Asundi

About the Editor	p. xi
Contributors	p. xiii
Series Preface	p. xvii
Acknowledgements	p. xix
Abbreviations	p. xxi
1 Introduction	p. 1
2 Digital Reflection Holography and Applications	p. 7
2.1 Introduction to Digital Holography and Methods	p. 7
2.1.1 Holography and Digital Holography	p. 7
2.1.2 Digital Recording Mechanism	p. 9
2.1.3 Numerical Reconstruction Methods	p. 10
2.2 Reflection Digital Holographic Microscope (DHM) Systems Development	p. 13
2.2.1 Optical Systems and Methodology	p. 13
2.3 3D Imaging, Static and Dynamic Measurements	p. 23
2.3.1 Numerical Phase and 3D Measurements	p. 23
2.3.2 Digital Holographic Interferometry	p. 25
2.4 MEMS/Microsystems Characterization Applications	p. 31
2.4.1 3D Measurements	p. 31
2.4.2 Static Measurements and Dynamic Interferometric Measurement	p. 35
2.4.3 Vibration Analysis	p. 39
References	p. 50
3 Digital Transmission Holography and Applications	p. 51
3.1 Historical Introduction	p. 51
3.2 The Foundation of Digital Holography	p. 53
3.2.1 Theoretical Analysis of Wavefront Interference	p. 58
3.2.2 Digital Hologram Recording and Reconstruction	p. 70
3.2.3 Different Numerical Reconstruction Algorithms	p. 71
3.3 Digital Holographic Microscopy System	p. 73
3.3.1 Digital Holographic Microscopy with Physical Spherical Phase Compensation	p. 74
3.3.2 Lens-Less Common-Path Digital Holographic Microscope	p. 79
3.3.3 Common-Path Digital Holographic Microscope	p. 84
3.3.4 Digital Holographic Microscopy with Quasi-Physical Spherical Phase Compensation: Light with Long Coherence Length	p. 92
3.3.5 Digital Holographic Microscopy with Quasi-Physical Spherical Phase Compensation: Light with Short Coherence Length	p. 99
3.4 Conclusion	p. 102
References	p. 104
4 Digital In-Line Holography and Applications	p. 109
4.1 Background	p. 109
4.2 Digital In-Line Holography	p. 111
4.2.1 Recording and Reconstruction	p. 111
4.3 Methodology for 2D Measurement of Micro-Particles	p. 114
4.3.1 Numerical Reconstruction, Pre-Processing and Background Correction	p. 114
4.3.2 Image Segmentation	p. 116
4.3.3 Particle Focusing	p. 117
4.3.4 Particle Size Measurement	p. 118
4.4 Validation and Performance of the 2D Measurement Method	p. 120
4.4.1 Verification of the Focusing Algorithm	p. 121
4.4.2 Spherical Beads on a Glass Slide	p. 123
4.4.3 Microspheres in a Flowing System	p. 124
4.4.4 10 ¿m Microspheres Suspension	p. 125
4.4.5 Measurements of Microfibers	p. 125
4.5 Methodology for 3D Measurement of Micro-Fibers	p. 128
4.5.1 Method 1: The 3D Point Cloud Method	p. 129
4.5.2 Method 2: The Superimposition Method	p. 130
4.6 Validation and Performance of the 3D Measurement Methods	p. 134
4.6.1 Experiment with a Single Fiber	p. 134
4.6.2 3D Measurements of Micro-Fibers in Suspension	p. 135
4.7 Conclusion	p. 136
References	p. 137
5 Other Applications	p. 139
5.1 Recording Plane Division Multiplexing (RDM) in Digital Holography for Resolution Enhancement	p. 141
5.1.1 Introduction of the Recording Plane Division Multiplexing Technique	p. 141
5.1.1.1 The SM Technique	p. 142
5.1.1.2 The ADM Technique	p. 143
5.1.1.3 The WDM Technique	p. 145
5.1.1.4 The PM Technique	p. 146
5.1.2 RDM Implemented in Pulsed Digital Holography for Ultra-Fast Recording	p. 147
5.1.2.1 Introduction	p. 147
5.1.2.2 AMD in the Pulsed Digital Holography	p. 148
5.1.2.3 WDM in Pulsed Digital Holography	p. 150
5.1.3 RDM Implemented by Digital Holography for Spatial Resolution Enhancement	p. 152
5.1.3.1 Introduction	p. 152
5.1.3.2 AMD in Digital Holography	p. 153
5.1.3.3 AMD and PM in Digital Holography	p. 156
5.1.4 Conclusion	p. 159
References	p. 160
5.2 Development of Digital Holographic Tomography	p. 161
5.2.1 Introduction	p. 161
5.2.2 Classification of Digital Holographic Tomography	p. 162
5.2.3 Principle of Digital Holographic Tomography	p. 166
5.2.3.1 Principle of Digital Holographic	p. 166
5.2.3.2 Reconstruction Principle of Computer Tomography	p. 166
5.2.3.3 CT Reconstruction Algorithms	p. 168
5.2.4 Application of DHT	p. 170
5.2.4.1 Detection of Biological Tissue	p. 170
5.2.4.2 Material Detection	p. 172
References	p. 175
5.3 Digital Holographic Interferometry for Phase Distribution Measurement	p. 177
5.3.1 Measurement Principle of Digital Holographic Interferometry	p. 177
5.3.1.1 Principle of Phase Measurement of the Object Wave Field	p. 178
5.3.1.2 Principle of Digital Holographic Interferometry	p. 180
5.3.2 Applications of Digital Holographic Interferometry in Surface Profile Testing of MEMS/MOEMS	p. 183
5.3.3 Applications of Digital Holographic Interferometry in Measuring Refractive Index Distribution	p. 185
5.3.3.1 Measurement of Light-Induced Index Change in Photorefractive Crystals	p. 186
5.3.3.2 Measurement of Acoustic Standing Wave Field	p. 191
5.3.3.3 Measurement of Plasma Plume Field	p. 192
5.3.3.4 Measurement of Temperature Distribution in Air Field	p. 193
5.3.3.5 Visualization Measurement of Turbulent Flow Field in Water	p. 194
References	p. 195
6 Conclusion	p. 199
Index	p. 201

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