Plasma electronics : applications in microelectronic device fabrication

Select an Action

Title:

Personal Author:

Edition:

Second edition

Publication Information:

Boca Raton, F.L. : CRC Press, Taylor & Francis Group, 2014

Physical Description:

xxxv, 376 pages : illustrations ;c24 cm.

ISBN:

9781482222050

Subject Term:

Added Author:

Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... PSZ JB	30000010338265	TA2020 M34 2014	Open Access Book	Book	Searching... Unknown