Plasma electronics : applications in microelectronic device fabrication

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Series:

Series in plasma physics

Publication Information:

New York, NY: Taylor & Francis, 2006

ISBN:

9780750309769

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Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... PSZ JB	30000010107932	TA2020 M34 2006	Open Access Book	Book	Searching... Unknown