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3 Results Found

000MAIN

Polymeric materials for microelectronic applications : science and technology

Ito, Hiroshi

Author

Ito, Hiroshi, Tagawa, Seiichi, Horie, Kazuyuki, American Chemical Society. Division of Polymeric Materials : Science and Engineering, Polymers for Microelectronics Meeting of the American Chemical Society (1993 : Kawasaki, Japan)

Format:

Call Number

TK7871.15.P6 P643 1994

Publisher

American Chemical Society,

Publication Date

1994

ISBN

9780841230552

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Polymers for microelectronics : resists and dielectrics

Thompson, L. F., 1944-

Author

Thompson, L. F., 1944-, Willson, C. G. (C. Grant), 1939-, Tagawa, Seiichi, American Chemical Society. Division of Polymeric Materials : Science and Engineering, American Chemical Society Meeting (203rd : 1992 : San Francisco, Calif)

Format:

Call Number

TK7871.15.P6 P64 1994

Publisher

American Chemical Society,

Publication Date

1994

ISBN

9780841227217

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Microelectronics processing : inorganic materials characterization

Casper, Lawrence A.

Author

Casper, Lawrence A., American Chemical Society. Division of Industrial and Engineering

Format:

Call Number

TK7874.M523 1986

Publisher

American Chemical Society,

Publication Date

1986

ISBN

9780841209343

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