Cover image for Polymers for high technology : electronics and photonics
Title:
Polymers for high technology : electronics and photonics
Series:
ACS symposium series; 346
Publication Information:
Washington, D C : American Chemical Society, 1987
ISBN:
9780841214064

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30000001839624 TK7871.15.P6 P65 1987 Open Access Book Book
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30000002278780 TK7871.15.P6 P65 1987 Open Access Book Book
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Summary

Summary

Examines the ongoing electronic and photonic revolution and the fundamental, chemically related principles underlying these technologies. Provides reports on definitive advances in relatively mature technologies, and offers a better understanding of the new materials and processes needed to meet the demands of tomorrow's technology. Will serve as the stepping stone to further advances in polymer technology for chemists in both the industrial and academic sphere.


Table of Contents

Development of Radiation Chemistry Ionizing
Radiation on Condensed Systems
Radiation Effects in Polymers Main
Reactions of Chlorine- and Silicon-Containing Resists
Relations Between Photochemistry and Radiation Chemistry
Characteristics of a Two-layer Resist System
Phenolic Resin-Based Negative Resists
Electron-Beam Sensitivity of Acrylate Resists
A ""One-Layer"" Multilayer Resist
Silicon-Containing Electron-Beam Resist
Systems Lithographic Evaluation of Copolymers Acid-Catalyzed Thermo