Cover image for Nanolithography and patterning techniques in microelectronics
Title:
Nanolithography and patterning techniques in microelectronics
Series:
Woodhead publishing in materials
Publication Information:
Cambridge : Woodhead Publishing Limited, 2005
ISBN:
9781855739314
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30000010099514 TK7874 N365 2005 Open Access Book Book
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Summary

Summary

Techniques such as surface patterning have facilitated the emergence of advanced polymers with applications in areas such as microelectronics. Surface patterning of polymers has conventionally been undertaken by optical lithography. However, a new generation of nanolithographic and patterning techniques has made it possible to develop complex patterns at the nanoscale. Non-conventional lithography and patterning summarises this new range of techniques and their industrial applications.A number of chapters look at ways of forming and modifying surfaces for patterning. These are complemented by chapters on particular patterning techniques such as soft lithography, ion beam patterning, the use of nanostencils, photolithography and inkjet printing. The book also discusses prototyping and the manufacture of particular devices.With its distinguished international team of contributors, Non-conventional lithography and patterning is a standard reference for both those researching and using advanced polymers in such areas as microelectronics and biomedical devices.


Author Notes

Dr David Bucknall is an Associate Professor at the Georgia Institute of Technology. He holds a joint appointment in the School of Polymers, Textiles and Fiber Engineering and the School of Materials Science and Engineering.