Cover image for Two- and three-dimensional methods for inspection and metrology VI
Title:
Two- and three-dimensional methods for inspection and metrology VI
Series:
Proceedings of SPIE ; v. 7066
Publication Information:
Bellingham, WA : SPIE, 2008
Physical Description:
1 v. (unpaged) : ill. ; 28 cm.
ISBN:
9780819472861
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30000010210374 TA1634 T86 2008 Open Access Book Proceedings, Conference, Workshop etc.
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Summary

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.