Cover image for MEMS : fundamental technology and applications
Title:
MEMS : fundamental technology and applications
Series:
Devices, circuits, and systems
Publication Information:
London : Taylor & Francis, 2013
Physical Description:
xxii, 456 pages : ill. ; 26 cm.
ISBN:
9781466515819

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30000010332283 TK7875 M457 2013 Open Access Book Book
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33000000000094 TK7875 M457 2013 Open Access Book Book
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Summary

Summary

The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world.

The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including:

Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems

Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.


Author Notes

Vikas Choudhary is currently a senior manager of MEMS and Sensor Technology Group at Analog Devices, where he is involved in design and management of products for Inertial MEMS. He also manages a team of engineers involved in the design of high-performance precision analog-to-digital converters. Vikas has more than 18 years of experience in the semiconductor industry, including as the architect and lead designer for several RFIC subsystems such as 802.16e and 802.11n. He has held various management and design positions at PMC-Sierra, Inc., Texas Instruments, and STMicroelectronics. He has three issued patents. His current research interests are in the field of applied signal processing for high-performance analog circuits and systems.

Krzysztof (Kris) Iniewski manages R&D at Redlen Technologies, Inc., a startup company in Vancouver, Canada. He is also the president of CMOS Emerging Technologies Research Inc., an organization of high-tech events covering communications, microsystems, optoelectronics, and sensors. Dr. Iniewski has held numerous faculty and management positions at the University of Toronto, University of Alberta, Simon Fraser University, and PMC-Sierra, Inc. He has published more than 100 research papers in international journals and conferences. He holds 18 international patents granted in the United States, Canada, France, Germany, and Japan. He is a frequent invited speaker, has consulted for multiple organizations internationally, and has written and edited several books.


Table of Contents

Daniel HaudenBing Miao and Rajat Mahapatra and Nick Wright and Alton HorsfallIsaku KannoAjit Sharma and Mohammad Faisal Zaman and Farrokh AyaziHouri JohariHyung Suk Yang and Paragkumar Thadesar and Chaoqi Zhang and Muhannad BakirMartin Marzencki and Skandar BasrourHongzhi Sun and Huikai XieVikas Chottdhary and Abhinav Dikshit and Anjan Kumar and Deva Phanindra Kumar and Saravanan Kamatchi and Nemai BiswasSumy JoseJ. R. Gonzalez and Mohamed Saad and Chris J. BleakleyHongbin Yu and Guangya Zhou and Fook Siong ChunFrederic Nabki and Tomas A. Dusatko and Mourad N. El-GamalHassen Fourati and Noureddine Manamanni and Lissan Afilal and Yves HandrichMohamed Sultan Mohamed Ali and Kenichi TakahataM. Amato and Massimo De Vittorio and S. PetroniJürgen Hildenbrand and Andreas Greiner and Jan G. KorvinkYao-Chiang KanSylvain Ballandias and Gilles Martin and Jean-Michel Friedt and Victor Plessky and Virginie Blondeau-Pâtissier and William Daniau and Thomas Baron and Luc Chommeloux and Stéphane Tourette and Jean-François Leguen and Bruno François and Christophe Droit and Meddy Vanotti and Marc Lamothe and David Rabus and Nicolas Chrétien and Emile Carry
Prefacep. xi
Editorsp. xvii
Contributorsp. xix
Section I Breakthrough Technology
Chapter 1 Microsystems to Nano-Microsystems: A Technological Breakthroughp. 3
Chapter 2 HfO 2 -Based High-K Dielectrics for Use in MEMS Applicationsp. 21
Chapter 3 Piezoelectric Thin Films for MEMS Applicationsp. 41
Chapter 4 CMOS Systems and interfaces for Sub-Deg/Hr Microgyroscopesp. 69
Chapter 5 Bulk Acoustic Wave Gyroscopesp. 91
Chapter 6 Mechanically Flexible Interconnects and TSVs: Applications in CMOS/MEMS Integrationp. 111
Chapter 7 Modeling of Piezoelectric MEMS Vibration Energy Harvestersp. 131
Chapter 8 Interface Circuits for Capacitive MEMS Gyroscopesp. 161
Chapter 9 Electromechanical Loops for High-Performance and Robust Gyroscope System Designp. 183
Section II MEMS-Based Novel Applications
Chapter 10 Bulk Acoustic Wave Resonators for Mobile Communication Systemsp. 205
Chapter 11 Wideband Ultrasonic Transmitter and Sensor Array for In-Air Applicationsp. 227
Chapter 12 MEMS-Based Lamellar Grating Fourier Transform Spectrometersp. 249
Chapter 13 Microelectromechanical Resonators for RF Applicationsp. 273
Chapter 14 Rigid Body Motion Capturing by Means of Wearable Inertial and Magnetic MEMS Sensor Assembly-From Reconstitution of the Posture toward Dead Reckoning: An Application in Bio-Loggingp. 313
Chapter 15 Radio-Controlled Wireless MEMS Actuators and Applicationsp. 331
Chapter 16 Advanced MEMS Technologies for Tactile Sensing and Actuationp. 351
Chapter 17 MEMS-Based Micro Hoi-Plate Devicesp. 381
Chapter 18 A Wireless Sensor Networks Enabled Inertial Sensorp. 401
Chapter 19 Passive Radio-Frequency Acoustic Sensors and Systems for Wired and Wireless Applicationsp. 417
Indexp. 441