Title:
Silicon science and advanced micro-device engineering I : selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan
Conference Author:
Series:
Key engineering materials ; 459
Publication Information:
Stafa-Zurich ; Enfield, N.H. : Trans Tech Publications, c2011
Physical Description:
xii, 282 p. : ill. ; 25 cm.
ISBN:
9780878492176
Added Conference Author:
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
---|---|---|---|---|---|
Searching... | 30000010283075 | TK7871.15.S55 I584 2009 | Open Access Book | Book | Searching... |