Title:
Effects of chemical mechanical polishing (CMP) parameters on NIP/AL substrate surface characteristics
Personal Author:
Publication Information:
2014
Physical Description:
xi, 74 p. : ill. (some col.) ; 30 cm.
General Note:
Supervisor : Prof. Dr. Noordin Mohd Yusof
Also available in CD-ROM : CP 032785 ra
Added Author:
Added Corporate Author:
DSP_DISSERTATION:
Thesis (Sarjana Kejuruteraan (Kejuruteraan Industri)) - Universiti Teknologi Malaysia, 2014
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 32000000000914 | TJ1280 M645 2014 raf | Closed Access Thesis | UTM Master Thesis (Closed Access) | Searching... |
Searching... | 30000010327517 | TJ1280 M645 2014 raf | Closed Access Thesis | UTM Master Thesis (Closed Access) | Searching... |
