Cover image for Smart sensors and MEMS
Title:
Smart sensors and MEMS
Series:
NATO science series. 181

NATO science series. ; 181
Publication Information:
Dordrecht : Kluwer Academic Publishers, 2004
ISBN:
9781402029288
General Note:
Papers from the NATO Advanced Study Institute on Smart Sensors and MEMS

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30000010100532 TK7872.D48 N37 2003 Open Access Book Proceedings, Conference, Workshop etc.
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Summary

Summary

The book Smart Sensors and MEMS provides an unique collection of contributions on latest achievements in sensors area and technologies that have made by eleven internationally recognized leading experts from Czech Republic, Germany, Italy, Israel, Portugal, Switzerland, Ukraine and USA during the NATO Advanced Study Institute (ASI) in Povoa de Varzim, Portugal, from 8 to 19 September 2003. The aims of this volume are to disseminate wider and in-depth theoretical and practical knowledge about smart sensors and its applications, to create a clear consciousness about the effectiveness of MEMS technologies, advanced signal processing and conversion methods, to stimulate the theoretical and applied research in these areas, and promote the practical using of these techniques in the industry. With that in mind, a broad range of physical, chemical and biosensors design principles, technologies and applications were included in the book.

It is a first attempt to describe in the same book different physical, chemical, biological sensors and MEMS technologies suitable for smart sensors creation. The book presents the state-of-the-art and gives an excellent opportunity to provide a systematic, in-depth treatment of the new and rapidly developing field of smart sensors and MEMS.

The volume is an excellent guide for practicing engineers, researchers and students interested in this crucial aspect of actual smart sensor design.


Table of Contents

Sergey Y. YurishSergey Y. Yurish and Nikolay V. KirianakiFabien Josse and Richard W. CernosekVittorio FerrariElke Mackensen and Leonhard ReindlPavel RipkaUlrich MeschederDmytro Fedasyuk and Volodymyr MakarP.G. Datskos, N.V. Lavrik and M. J. SepaniakP.G. Datskos, N.V. LavrikMaria Teresa S. R. GomesEugenii Katz
List of Contributorsp. ix
Prefacep. xii
Acknowledgementp. xv
1 Smart Sensors for Electrical and Non-electrical, Physical and Chemical Variables: State-of-the-artp. 1
2 Novel Conversion Methods for Self-Adaptive Smart Sensorsp. 51
3 Resonant Piezoelectric Devices as Physical and Biochemical Sensorsp. 91
4 Acoustic-Wave Piezoelectric and Pyroelectric Sensors Based on PZT Thick Filmsp. 125
5 Wireless Passive SAW Identification Marks and Sensorsp. 155
6 Precise Vectorial Magnetic Sensorsp. 203
7 Micro-Hall Magnetic Sensors: Physics, Technologies and ApplicationsRadivoje S. Popovic et al.
8 Modern Silicon-based MEMS Technologyp. 255
9 Porous Silicon: Technology and Applications for Micromachining and MEMSUlrich Meschederp. 273
10 Thermal Design of Microelectronics Systemsp. 289
11 Chemical and Biological Sensors Based on Microcantileversp. 331
12 Uncooled Infrared MEMS Detectorsp. 381
13 Bulk Acoustic Wave Sensors in Chemical Analysisp. 421
14 Electronic Biosensors Based on Biomaterial-Nanoparticle Hybrid Systemsp. 447
Index.p. 475