Characterization of amorphous silicon-carbon alloy films (a-Si:C:H) prepared by radio frequency (RF) sputtering

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Publication Information:

Skudai : Universiti Teknologi Malaysia, 2005

Physical Description:

1 CD-ROM ; 12 cm.

General Note:

Also available in printed version : QC176.83 L38 2005 raf

Subject Term:

DSP_DISSERTATION:

Thesis (Sarjana Sains (Fizik)) - Universiti Teknologi Malaysia, 2005

Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... PSZ JB	30000010055168	CP 10761	UTM Special Collection - Computer File	Compact Disc Accompanies UTM Thesis/Project Paper	Searching... Unknown