Title:
Microlithography : science and technology
Edition:
2nd ed.
Publication Information:
Boca Raton, FL : CRC, 2007
Physical Description:
848 p. : ill. ; 27 cm.
ISBN:
9780824790240
Added Author:
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 30000010209817 | TK7836 M54 2007 | Open Access Book | Book | Searching... |
