Cover image for RF MEMS:  theory, design and technology
Title:
RF MEMS: theory, design and technology
Personal Author:
Publication Information:
Hoboken, NJ : John Wiley & Sons, 2003
ISBN:
9780471201694

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30000010019708 TK7875 R42 2003 Open Access Book Book
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30000010115546 TK7875 R42 2003 Open Access Book Book
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Summary

Summary

Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.


Author Notes

GABRIEL M. REBEIZ received his PhD from the California Institute of Technology. He was the recipient of the National Science Foundation Presidential Young Investigator Award, and in 2000 was the corecipient of the IEEE Microwave Prize. A Fellow of the IEEE and a consultant to Rockwell, Samsung, Intel, Standard MEMS, and Agilent, he has published extensively in the field of microwave technology and in the area of RF MEMS. He was at the University of Michigan, Ann Arbor, and is now a Professor of Electrical and Computer Engineering at the University of California, San Diego.


Table of Contents

Preface
Chapter 1 Introduction: RF MEMS for Microwave Applications
Chapter 2 Mechanical Modeling of MEMS Devices: Static Analysis
Chapter 3 Mechanical Modeling of MEMS Devices: Dynamic Analysis
Chapter 4 Electromagnetic Modeling of MEMS Switches
Chapter 5 MEMS Switch Library
Chapter 6 MEMS Switch Fabrication and Packaging
Chapter 7 MEMS Switch Reliability and Power Handling
Chapter 8 Design of MEMS Switch Circuits
Chapter 9 MEMS Phase Shifters
Chapter 10 Distributed MEMS Phase Shifters and Switches
Chapter 11 MEMS Varactors and Tunable Oscillators
Chapter 12 Micro machined Inductors
Chapter 13 Reconfigurable MEMS Networks, Filters, Antennas, and Subsystem
Chapter 14 Phase Noise Analysis of MEMS Circuits, Phase Shifters, and Oscillators
Chapter 15 Future Work in RF MEMS
Appendix A Detailed Analysis and Measurements of Intermodulation Distortion and Power Handling in RF MEMS Switches, Varactors, and Tunable Filters
Appendix B Mechanical, Electrical, and Thermal Properties of RF MEMS Materials
Index