Cover image for Design, modeling and control of nanopositioning systems
Title:
Design, modeling and control of nanopositioning systems
Personal Author:
Series:
Advances in industrial control
Publication Information:
Cham : Springer , c2014
Physical Description:
xvi, 411p. : ill.(some col.) ; 24cm.
ISBN:
9783319066165
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33000000016465 T174.7 F54 2014 Open Access Book Book
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