Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices

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Publication Information:

Boca Raton, FL : CRC Press/Taylor & Francis Group, 2009

Physical Description:

xiii, 191 p. : ill. (some col.) ; 25 cm.

ISBN:

9781420059113

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Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... PSZ JB	30000010201622	TK7874.84 P34 2009	Open Access Book	Book	Searching... Unknown