Nanolithography and patterning techniques in microelectronics

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Series:

Woodhead publishing in materials

Publication Information:

Cambridge : Woodhead Publishing Limited, 2005

ISBN:

9781855739314

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Library	Item Barcode	Call Number	Material Type	Item Category 1	Status
Searching... PSZ JB	30000010099514	TK7874 N365 2005	Open Access Book	Book	Searching... Unknown