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Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 33000000001423 | TJ211 M3678 2010 | Open Access Book | Book | Searching... |
Searching... | 30000010277791 | TJ211 M3678 2010 | Open Access Book | Book | Searching... |
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Summary
Summary
Understand the design, testing, and application of cleanroom robotics and automation with this practical guide. From the history and evolution of cleanroom automation to the latest applications and industry standards, this book provides the only complete overview of the topic available. With over 20 years' industry experience in robotics design, Karl Mathia provides numerous real-world examples to enable you to learn from professional experience, maximize the design quality and avoid expensive design pitfalls. You'll also get design guidelines and hands-on tips for reducing design time and cost. Compliance with industry and de-facto standards for design, assembly, and handling is stressed throughout, and detailed discussions of recommended materials for atmospheric and vacuum robots are included to help shorten product development cycles and avoid expensive material testing. This book is the perfect practical reference for engineers working with robotics for electronics manufacturing in a range of industries that rely on cleanroom manufacturing.
Author Notes
Dr. Karl Mathia studied in Germany and the United States and holds advanced degrees in Electrical and Computer Engineering. He has over 20 years of experience in research and development, product development engineering, and has also held management positions at leading robotic firms, including Brooks Automation and Newport Corporation.
Table of Contents
| Preface | p. xi |
| 1 Industrial robotics | p. 1 |
| 1.1 History of industrial robotics | p. 1 |
| 1.2 The global robotics industry | p. 2 |
| 1.3 Applications and operational stock by region | p. 5 |
| 1.4 Socioeconomic impact | p. 6 |
| 1.5 Definitions, standards, and terminology | p. 7 |
| 1.6 Applicable and related standards | p. 11 |
| 2 Cleanroom robotics | p. 12 |
| 2.1 Manufacturing in cleanroom environments | p. 12 |
| 2.2 Semiconductor manufacturing | p. 14 |
| 2.3 Flat panel display manufacturing | p. 20 |
| 2.4 Substrate-handling, robots | p. 23 |
| 2.5 Applicable and related standards | p. 28 |
| 3 Design of atmospheric robots | p. 30 |
| 3.1 Clean materials | p. 30 |
| 3.2 Prevention of electrostatic charge | p. 37 |
| 3.3 Surface finishes for cleanroom robotics | p. 43 |
| 3.4 Clean drive trains | p. 48 |
| 3.5 Arm compliance | p. 53 |
| 3.6 End-effectors | p. 60 |
| 3.7 Robot assembly and handling | p. 62 |
| 3.8 Applicable and related standards | p. 70 |
| 4 Design of vacuum robots | p. 73 |
| 4.1 Robotics challenges in vacuum environments | p. 73 |
| 4.2 What is vacuum? | p. 74 |
| 4.3 Static vacuum barrier | p. 76 |
| 4.4 Dynamic vacuum barrier | p. 79 |
| 4.5 Clean drive trains | p. 92 |
| 4.6 External and internal leaks | p. 99 |
| 4.7 Materials and surface finishes | p. 104 |
| 4.8 Assembly and installation of vacuum robots | p. 115 |
| 4.9 Applicable and related standards | p. 120 |
| 5 Kinematics | p. 124 |
| 5.1 Joint space, operational space, and workspace | p. 124 |
| 5.2 Kinematic robot structures | p. 126 |
| 5.3 Mathematical foundations | p. 129 |
| 5.4 Forward kinematics | p. 134 |
| 5.5 Inverse kinematics | p. 149 |
| 5.6 Commercial substrate-handling robots | p. 150 |
| 5.7 Applicable and related standards | p. 153 |
| 6 Dynamics and control | p. 154 |
| 6.1 Manipulator dynamics | p. 154 |
| 6.2 Robot motion control | p. 162 |
| 6.3 Networked, decentralized robot control | p. 172 |
| 6.4 Applicable and related standards | p. 177 |
| 7 Test and characterization | p. 179 |
| 7.1 Airborne particle contamination | p. 179 |
| 7.2 Surface particle contamination | p. 182 |
| 7.3 Positioning accuracy and repeatability | p. 186 |
| 7.4 Path accuracy and repeatability | p. 199 |
| 7.5 Vibration analysis | p. 206 |
| 7.6 Mechanical axis decoupling | p. 212 |
| 7.7 Applicable and related standards | p. 218 |
| Appendix A SI units and conversion tables | p. 220 |
| Appendix B Standards organizations | p. 223 |
| Appendix C Standard temperature and pressure (STP) | p. 225 |
| References | p. 226 |
| Index | p. 232 |
