Title:
Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment and ergonomics
Personal Author:
Publication Information:
Park Ridge, NJ : Noyes Data, 1995
ISBN:
9780815513698
Added Author:
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 30000003818766 | TK7836 W54 1995 | Open Access Book | Book | Searching... |
On Order
Summary
Summary
This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.
Table of Contents
| 1 Introduction |
| Foreword |
| Overview of Book |
| Background |
| 2 IH Monitoring |
| Overview of I H Monitoring |
| Assessment Tools |
| Biomonitoring-Urinary Arsenic Testing |
| Chemical Agents |
| 3 IH Monitoring-Physical Agents |
| Noise |
| Nonionizing Radiation |
| Ionizing Radiation |
| 4 Ventilation |
| Types |
| Monitoring |
| Guidelines and Standards |
| 5 Personal Protective Equipment (PPE) |
| Chemical Protective Gloves |
| Respiratory Protection |
| Indoor Air Quality (IAQ) |
| Recognition of IAQ Problems |
| Odor Identification |
| Causative Agents |
| Evaluation of IAQ Problems |
| Generally Recognized Acceptable Levels |
| Industrial Hygiene IAQ Monitoring Equipment |
| Prevention of IAQ Problems |
| Records |
| 7 Ergonomics |
| Identification and Evaluation of Physical Stressors |
| Stressful Postures Associated with CTD's |
| Semiconductor Ergonomic/Material Handling Exposures |
| Ergonomic Design and Layout Principles |
| Semiconductor Equipment |
| 8 IH Recordkeeping |
| General |
| Continuous Monitoring Records |
| Ventilation Records |
| Employee Communication |
| Personnel Records |
| 9 Plan Review |
| Appendix A Silicon Ingot and Wafer Manufacturing |
| Appendix B III-V Ingot and Wafer-Light- Emitting Diode (LED) |
| Appendix C III-V Microwave IC |
| Appendix D Bibliography |
| Appendix E Safety Considerations During Maintenance Following Arsenic and Phosphorus Operations |
