Cover image for Optical inspection of microsystems
Title:
Optical inspection of microsystems
Series:
Optical science and engineering ; 109
Publication Information:
Boca Raton, FL : CRC, 2007
Physical Description:
503 p. : ill. (some col.) ; 26 cm.
ISBN:
9780849336829
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30000010185216 TS156.2 O65 2007 Open Access Book Book
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