Title:
Low temperature deposition of hydrogenated nanocrystalline SiC films by helicon wave plasma enhanced chemical vapor deposition
Personal Author:
General Note:
J. Vac. Sci. Technol. A, Vol. 28(5):1234-1239. 2010
Available:*
Library | Item Barcode | Call Number | Material Type | Item Category 1 | Status |
|---|---|---|---|---|---|
Searching... | 30000010265933 | MAK 18509 | Open Access Book | ILL Article | Searching... |
